Apparatus for fixing an electrode in plasma polymerizing apparatus

ABSTRACT

An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on chamber wall.

TECHNICAL FIELD

[0001] The present invention relates to an electrode in a plasmapolymerizing apparatus and particularly, to an apparatus for fixingelectrode in a plasma polymerizing apparatus, capable of insulating anelectrode, preventing transformation of the electrode by fixing theelectrode on a wall of a chamber and easing installing and removing ofthe electrode.

BACKGROUND ART

[0002] If a surface of a substrate such as a steel plate is coated witha thin film using plasma, a stratum tectorium having good consistencyand abrasion resistance is formed. Products having the stratum tectoriumare used as a magnetic disk, optical disk, carbide tool and the like.Also, if the paint-coated film generated on the surface of a steel plateis undergone plasma processing, an unplasticized paint which coatedsteel plate having good durability and corrosion resistance.Particularly, through the processing, quality of the surfaces can beimproved increasing hydrophile and hydrophobe by polymer polymerizingthe surface of the substrate, and the improved substances are widely inuse.

[0003] As a typical example of the plasma polymerizing apparatus, anapparatus is disclosed in WO99/28530. In FIG. 1, the apparatus iscomposed of a vacuum chamber 1, and electrode 4 installed in the chambervacuum pumps 5, 6 for controlling pressure in the vacuum chamber, gauges7, 8 for measuring degree of vacuum, a power supply apparatus 3 forgenerating potential difference in an electrode, and reactive gasadjusting apparatuses 9, 10 for supplying unreactive gas such asreactive gas and nitrogen around the substrate.

[0004] An example of plasma polymerizing processing by the aboveapparatus will be described as follows. The substrate 2 is installed inthe chamber 1 and whether the pressure in the chamber is maintained tobe vacuous about 10⁻⁶ Torr is checked with the ion gauge 8 by startingthe diffusion pump 6 after checking whether the pressure in the chamberis maintained to be vacuous about 10⁻³ Torr with the thermocouple gauge7 by starting the rotary pump 5. The substrate is biased-positioned asan anode (or an active electrode) by the power supply 3 and theelectrode 4 on the other side is grounded. If the pressure of thechamber is maintained as regular vacuum, reactive gas and unreactive gasare supplied around favorable places in order. The mixture ratio iscontrolled by the pressure of the thermocouple measurer. In case thepressure in the vacuum chamber become a certain vacuum, the vacuumchamber is discharged With direct current or high-frequency wave. Then,in the plasma generated by the direct current or high-frequency wave,the molecular binding is broken and the broken chains and activatedcation and anion combine, thus to form a polymerized material on thesurface of the substrate which is positioned between the electrodes.

[0005] In the above apparatus, a power is not supplied to the electrode4 and is grounded. In case a power is supplied to the electrode, theelectrode is needed to be insulated with the chamber and a means forfixing the electrode is needed to position the substrate to have apredetermined interval from the processed substrate. Particularly, incase of an apparatus capable of continuously performing plasmapolymerizing processing as well as the above discontinuous apparatus,when the apparatus is operated for a long time, the electrode can beslack down or the interval between the electrode and the substrate canbe changed.

TECHNICAL GIST OF THE PESENT INVENTION

[0006] Therefore, an object of the present invention is to provide anelectrode structure, capable of insulating an electrode and chamber incase a power is supplied to the electrode in a plasma polymerizingapparatus.

[0007] Also, another object of the present invention is to provide atensile force adjusting means for efficiently fixing the electrode for along time and preventing deformation of the electrode.

[0008] Also, still another object of the present invention is to providean apparatus for fixing electrode in a plasma polymerizing apparatuswhich is appropriate for easing installing and removing of the electrodein the chamber to be simply completed in a short time.

DETAILED DESCRIPTION OF THE INVENTION

[0009] In order to achieve the above objects, there is provided anapparatus for fixing electrode in a plasma polymerizing apparatus,including a processing chamber, a vacuum pump for maintaining vacuumcondition in the chamber, at least one electrode positioned in thechamber, for discharging high voltage, an apparatus for fixing theelectrode which fixes the electrode and a power supply for applyingelectric power to the electrode and the apparatus for fixing theelectrode includes an electrode holder part made of insulating material,for covering and fixing the end of the electrode, a lead line partpassing through the electrode holder part for electrically connectingthe electrode and the power supply and a fixing part for fixing theelectrode holder part in a proper position in the chamber.

[0010] Also, in order to achieve the above objects, there is provided anapparatus for fixing electrode in a plasma polymerizing apparatus,including a processing chamber, a vacuum pump for maintaining vacuumcondition in the chamber, at least one sheet-shaped electrode positionedin the chamber, for discharging high voltage, a power supply forapplying electric power to the electrode, an electrode holder part madeof insulating material, for covering and fixing the end of theelectrode, a lead line part passing the electrode holder part forelectrically connecting the electrode and the power supply apparatus, afixing part for fixing the electrode holder part in a proper position inthe chamber and an elastic part for providing an elastic force in thelongitudinal direction of the electrode.

[0011] Also, in order to achieve the above objects, there is provided anapparatus for fixing electrode in a plasma polymerizing apparatus,including a processing chamber, a vacuum pump for maintaining vacuumcondition in the chamber, at least one sheet-shaped electrode positionedin the chamber, for discharging high voltage, a power supply forapplying electric power to the electrode, an electrode holder part madeof insulating material, for covering and fixing the end of theelectrode, a lead line part passing the electrode holder part forelectrically connecting the electrode and the power supply apparatus andan internal holder made of cylindrical conductive substance, which isfixed covered by the electrode holder part and to which an end of theelectrode is wound.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012]FIG. 1 is a schematic view showing a conventional plasmapolymerizing apparatus.

[0013]FIG. 2 is cross-sectional view showing a plasma polymerizingcontinuous processing system.

[0014]FIG. 3 is a perspective view showing an embodiment of the presentinvention.

[0015]FIG. 4a is a longitudinal sectional view showing anotherembodiment of the present invention.

[0016]FIG. 4b is the other longitudinal sectional view showing anotherembodiment of the present invention.

[0017]FIG. 5 is a schematic view showing thermal deformation of anelectrode according to the polymerizing processing.

[0018]FIG. 6a is a plan view showing still another embodiment of thepresent invention.

[0019]FIG. 6b is a cross-sectional view taken along section line A-A ofFIG. 6a.

[0020]FIG. 7a is a cross-sectional view showing an electrode structurebefore thermal deformation.

[0021]FIG. 7b is a cross-sectional view showing an electrode structureafter thermal deformation.

[0022]FIG. 8 is a perspective view showing still another embodiment ofthe present invention.

[0023]FIG. 9 is a perspective view showing the embodiment of FIG. 8 indetail.

[0024]FIG. 10 is a cross-sectional view taken along section line A-A′ ofFIG. 8.

[0025]FIG. 11 is a cross-sectional view taken along section line B-B′ ofFIG. 8.

MODE FOR CARRYING OUT THE PREFERRED EMBODIMENTS

[0026] The present invention will now be described with reference toaccompanying drawings. An electrode installed in the processing chamberin a plasma polymerizing apparatus can be formed variously butgenerally, it is formed in a sheet-shaped form. The sheet-shapedelectrode is installed maintaining a predetermined interval from theupper or lower or both portions of a substrate. When a power issupplied, discharge is occurred among electrodes and by the discharge,the condition of reactive gas supplied into the chamber becomes plasmacondition.

[0027] The gas under the plasma condition modifies the surface of thesubstrate positioned in the chamber or forms a new surface layer.Maintaining a predetermined interval between the electrode and thesubstrate to be surface-processed is very important to uniformlysurface-processing the substrate by plasma polymerizing.

[0028] To maintain the predetermined interval between the electrode andthe substrate to be polymerized, a means for fixing the electrode isnecessary. The means for fixing electrode prevents the electrode frombeing slack by fixing both edges of the electrode and adding apredetermined tensile force.

[0029] On the other hand, if a power is supplied to the electrode,insulating between the means for fixing the electrode and the chamber isneeded since the means for fixing electrode is fixed on the wall of thechamber and abutted to the chamber.

[0030] The apparatus for fixing the electrode includes a sheet-shapedelectrode, an electrode holder fixed on the inner wall of the chamber,which is made of insulating substance completely covering the end of theelectrode, a lead line part for connecting the electrode with the properposition on the inner wall of the chamber.

[0031] Also, the apparatus can include an inner holder made ofconductive substance abutted to the end of the electrode and theelectrode holder part is fixed completely covering the inner holder.

[0032] The inner holder can be made of cylindrical conductive substanceto which an end of the electrode is wound in accordance with anembodiment and the holder can be composed of two plates abutted on anupper and lower surfaces of end of the electrode in accordance withanother embodiment.

[0033] In any case, it is desirable that the inner holder is made ofconductive substance.

[0034] It is desirable that the electrode holder includes the innerholder and covers the electrode. Also, it is desirable that theelectrode holder is composed of an upper holder and lower holder, thusto ease installation and removing of the electrode.

[0035] To the electrode, the power must be supplied in any ways andelectricity can flow to the electrode by directly connecting the powersupply apparatus and the electrode or connecting the inner holder andthe lead line.

[0036] On the other hand, the electrode can be sheet-shaped mesh typemetal. The mesh type electrode can prevent concentration of electricfields at the edges of the electrode and also ease fixing of the end ofthe electrode to the inner holder.

[0037] The electrode structure in accordance with the present inventionis devised to be installed in the chamber in the plasma polymerizingapparatus but the present invention can be applied to every apparatussimilar to it. Particularly, the present invention is useful for acontinuous processing apparatus capable of continuouslysurface-processing for a long time.

[0038] An example of the continuous plasma polymerizing apparatus isshown in FIG. 2. As shown in the drawing, an electrode 23 is fixed tothe upper and lower sides having a predetermined interval so that thesubstrate 22 can pass the channel in the processing chamber 21 and anunwinder 26 on which the substrate is wound is installed in an unwinderchamber 25 installed at the front of the processing chamber 11. At therear of the processing chamber 11, a winder 27 for winding thesubstrate, having a deposited polymerizing film, is installed in awinder chamber 28. The both ends of the electrode is fixed on the innerwall of the chamber by the electrode holder 29.

[0039] On the drawing, the electrode is installed in the chamber inparallel with the direction of the flowing of the substrate to besurface-processed, but in case the electrode is installed in thevertical direction, namely, in case the electrode is installed in thevertical direction on the same plane same as the direction of the flowof the substrate, the apparatus for fixing the electrode in accordancewith the present invention can also be applied. Also, the apparatus forfixing the electrode in accordance with the present invention can beused also in case many electrodes are installed opposed to each other ona surface or upper and lower surfaces of the substrate as well as incase an electrode is installed on a surface.

[0040] An embodiment of the present invention is shown in FIG. 3. Asshown in the drawing, the ends of the electrode 31 are inner holders onthe upper and lower surfaces and are fixed to the combining means 33under the condition that the upper plate 32 a and lower plate 32 b areabutted to each other and each plate and electrode holder are fixedusing a combining means 36 on the outer surface of each plate under thecondition that the upper electrode holder 34 and lower electrode holder35 are abutted to cover the whole plate. It is desirable that theelectrode holder has a groove so that a plate can be inserted in theinner surface. It is desirable that the combining means are a screw orrivet which are conventionally used, but any devices with the samefunction can be used. The other end of the electrode not shown on thedrawing is fixed by the inner holder and electrode holder same as theopposite one.

[0041] To have the upper and lower plates for fixing the electrodetransmit the supplied power source to the electrode, the material of theplates must be made of conductive body and on the other hand, the upperand lower electrode holders must maintain insulating performance so thatthe supplied power source is transmitted only to the electrode and notto be transmitted to the outside. To achieve this, the electrode holderis fabricated with insulating substance having a relatively good heatresistance and completely covers the end of the electrode and plate tointercept the electrode from transmitting electricity to thecircumference such as the chamber wall.

[0042] The upper and lower plate is adhered to the electrode itself sothat the electrode combines with the electrode holder. A surface of theplate is abutted to the electrode holder, thus to maintain apredetermined frictional force with the electrode and electrode holder.Consequently, the electrode and electrode holder maintains a solidcombination through the medium of the upper plate and lower plate.

[0043] In case the electrode is replaced, it is desirable that theelectrode is replaced being attached with the plate without separatingthe electrode from the plate.

[0044] The method for supplying a power source to the electrode can havemany examples and hereinafter, the case that the power supply means isincluded in the apparatus of fixing the electrode in accordance with thepresent invention will be described.

[0045]FIGS. 4a and 4 b are another embodiments of the present inventionand longitudinal section and transverse section are respectively shown.The both ends of the electrode 40 are fixed-abutted by the upper plate41 and lower plate 42 at the upper and lower portions. The plates arerespectively fixed-abutted by the upper holder 43 and the lower holder44.

[0046] A lead line 46 such as the electric wire is connected to theupper plate. In the embodiment in the drawing, the lead line isconnected to the upper plate, but the lead line can be connected to thelower plate.

[0047] The upper holder 43 and lower plate 44 are strongly combined bythe combining means 45 such as a screw and fix the electrode and plate.The electrode holder is fixed on the chamber wall by the fixing meansagain. Reference numeral 47 designates a combining portion for fixingthe inner wall of the chamber (not shown) and the lower holder 43. Theupper plate and lower plate are combined to each other by the combiningmeans such as the screw centering the electrode.

[0048] In the above embodiment, the lead line is abutted to the upperplate which covers the electrode, through the through groove formed inthe electrode holder and electricity flows through the electrodeindirectly. On the other hand, an opening can be formed on a part of thesurface of the plate and the electricity applying means can be directlyabutted to the electrode. Also, electricity can flow by connecting thelead line to the combining part (for instance, the screw) between theupper and lower holders.

[0049] The other side of the lead line is connected to the power sourcesupply apparatus outside the chamber and it is desirable that aninsulating part is formed on the chamber wall to be insulated orinsulating substance is coated on the lead line itself at the portionprotruded by the lead line on the chamber wall.

[0050] With the present invention, the electrode holder gives a tensileforce so that the electrode is remained in a predetermined shape andparticularly, it is important that it gives a tensile force from theboth sides of the electrode so that a part of the electrode is not slackby the gravity while the polymerizing processing is performed. In casethe polymerizing processing is performed for a long time, thetemperature of the electrode rises and heat deformation is generated inthe electrode as time passes. By the heat deformation of the electrode,the initial shape of the electrode becomes slack in the direction of thegravity and such phenomenon is shown in FIG. 5. In lower portion of FIG.5, sagging of the electrode by the heat deformation can be shown.

[0051] Reference numeral 51 designates an electrode holder. When theelectrode becomes slack, the distance between the substrate andelectrode becomes different according to the part of the electrode.Accordingly, uniformity of the film which is polymerized on the surfaceof the substrate decreased and the polymer material formed on thesurface of the substrate can not be abutted well, thus to decreasedurability of the polymer film and deteriorate the quality of product.

[0052] The means for having the electrode holder continuously give thetensile force to the electrode will be described as follows.

[0053]FIG. 6a is a plan view showing and embodiment of a tensile forceadjusting means in the apparatus of fixing the electrode in accordancewith the present invention, having an elastic part for giving elasticforce in the longitudinal direction of the electrode. The electrode 62is fixed in gear with the holder 63 and the holder is positioned on thesupporting part 64. The supporting part is fixed on the inner wall ofthe chamber and a sliding guide pin 62 is lengthened penetrating theholder on the supporting part. The holder can move in the longitudinaldirection of the electrode by the sliding guide pin. A compressivespring 38 is inserted as an elastic body between an end of thesupporting part and the holder.

[0054]FIG. 6b is a cross-sectional view taken along section line A-A ofFIG. 6a and shows respective components more precisely. Particularly,the position of the compressive spring 68 between the end of thesupporting part 64 and the holder 63 is shown in detail.

[0055]FIG. 7a shows that the holder 63 fixes the electrode at the bothsides of the electrode 62. Here, movable holders are installed at bothsides, but on the other hand, the holders can be set capable of fixing aholder at a side and moving only the holder at the other side. Theelectrode shown in the drawing is under the condition before the plasmapolymerizing processing and the electrode 62 is tightly fixed to bothholders 63, thus to have the initial length F of the electrode same asthe distance between holders.

[0056]FIG. 7b shows that the length of the electrode becomes slack aslong as F′ by heat deformation by performing plasma polymerizingprocessing for a long time. At this time, the electrode is alsomaintained tight without being slack. This is possible by the tensileforce giving means of the electrode in accordance with the presentinvention. In the drawing, the compressive spring 68 pushes the holderin the longitudinal direction of the electrode 62 by an elastic forceand the distance between the holders for fixing the electrode islengthened as long as F′. Therefore, the electrode is not slack andmaintains the tight condition even if the electrode is hung down by heatdeformation.

[0057] The electrode structure is manufactured by fixing the plate usingthe combining means under the condition that the plate is abutted on theupper and lower surfaces of the end of the electrode and then fixing theplate using the combining means under the condition that the electrodeholder is abutted to the upper and lower portion of the respectiveplate.

[0058] The electrode structure assembled as in the above is used underthe condition that it is fixed to the inside of the processing chamberand in case of dismantling the electrode, the electrode is dismantled inthe reverse order. With the present invention, installing and removingof the electrode can be eased more as shown in the embodiment describedas follows.

[0059] With reference to FIG. 8, the upper holder 81 isinserted-installed at the upper side of the lower electrode holder 80having both ends fixed in the inner wall of the processing chamber and acylindrical inner holder 83 to which an end portion of the electrode 82is fixed is positioned between the lower holder 80 and the upper holder81.

[0060] With reference to FIG. 9, the electrode structure will bedescribed in more detail as follows.

[0061] At the rear of the upper surface of the lower holder 80, a mainwall part 85 is formed in the longitudinal direction to be protrudedupwards and at the front both ends of the main wall 85, a protrusionpart 86 is formed being protruded. At the insertion groove 88 formedbetween the protrusion part 86 and main wall part 85, the both ends ofthe cylindrical inner holder 83 and both end portions of the upperholder 81 are inserted in order.

[0062] Also, a lower mounting groove 88 a is formed on the upper surfaceof the insertion groove in the longitudinal direction so that the lowersurface of the inner holder 83 is mounted and an upper mounting groove81 b is formed on the lower surface of the upper holder 81 to which theupper surface of the inner holder 83 is abutted.

[0063] The electrode mounting part 87 is formed between the protrusionparts 86 so that the sheet-shaped electrode 82 fixed to the inner holder83 so that an end portion is wound can be positioned.

[0064] In the present invention, to supply the power source into theelectrode, the cylindrical inner holder can be lengthened to the outsideof the upper holder and lower holder so that the inner holder can beconnected with the lead line and as in the above embodiment, the leadline can be connected to the inner holder or electrode by forming athrough groove in the upper holder.

[0065] On the other hand, at the both end portions of the main wall part85 formed in the lower holder 80 and both end portions of the protrusionpart 86 and the upper holder 81, pin holes 85 a, 86 a and 81 a arerespectively formed to be connected to each other in case of combiningand a fixing pin 84 is positioned capable of being installed and removedin the pin holes formed as above, thus to prevent the upper holder frombeing seceded from the lower holder.

[0066]FIG. 10 is a cross-sectional view taken along section line A-A′ ofFIG. 8 and FIG. 11 is a cross-sectional view taken along section lineB-B′ of FIG. 8.

[0067] On the outer circumferential surface of the front portion of thefixing pin 84, a stopping groove 84 a is formed in the semicircularshape with a predetermined depth. At the protrusion part 86 of the lowerholder 80, a vertical holder (reference numeral 89 in FIG. 11) is formedin the vertical direction from the lower surface so that it is connectedto the pin hole 86. On the vertical hole, a stopper ball supported bythe spring 90 is inserted and secession of the fixing pin 84 isprevented by installing and removing the stopper ball 91 in a stoppinggroove 84 a of the fixing pin 84. A negative screw part is formed on theinner circumferential surface of the inlet side of the lower portion ofthe vertical hole 89 and a screw cap 72 having a positive screw partformed on the outer circumferential surface to be combined with thescrew is combined to the lower portion of the spring 90.

[0068] In case the above electrode structure is assembled, a cylindricalinner holder 83 is mounted in the lower mounting groove 88 a formed onthe upper surface of the lower holder 80 and the sheet-shaped electrode82 connected to the inner holder 83 is installed in the electrodemounting part 87.

[0069] The both end portions of the upper holder 81 are combined beinginserted in the insertion groove 88 of the lower holder 80. The uppersurface of the inner holder 83 is abutted to the upper mounting groove81 b formed on the lower surface of the upper holder 81.

[0070] Under the above condition, the fixing pin 84 is inserted in thepin hole 85 a at the rear of the main wall part 85 of the lower holder80 and the fixing pin is combined thus to pass through the pin hole 81 aof the upper holder and the pin hole 86 a formed in the protrusion part86 of the lower holder. When the stopping groove 84 a formed in thefixing pin 84 passes the upper side of the vertical hole 89 a, thestopper ball 91 supported upwards by the electricity of the spring 90 isinserted in the stopping groove 84 a of the fixing pin 84.

[0071] In case the electrode structure in accordance with the presentinvention assembled as above is dismantled, the assembling process isperformed in the reverse order.

[0072] Namely, when the user pulls the fixing pin 84 to the oppositedirection that it is inserted, the stopper ball 91 inserted in thestopping groove 84 a of the fixing pin moves downwards and is secededfrom the stopping groove 84 a and 1o if the user pulls the fixing pin 84continuously, the fixing pin 84 is completely seceded from the pin holesof the respective holders. Under the above condition, dismantling of theelectrode can be performed easily by the process of separating the innerholder 83 connected with the upper holder 81 and the electrode from thelower holder 80 in order.

INDUSTRIAL APPLICABILITY

[0073] As so far described, according to the present invention, theinterval with the polymerized substrate can be maintained uniformly byefficiently fixing the electrode in the chamber and replacement of theelectrode can be eased. Also, dangers such as a electric shock can beprevented in advance by insulating parts except the part to which thepower source is applied.

1. An apparatus for fixing electrode in a plasma polymerizing apparatus,comprising: a processing chamber; a vacuum pump for maintaining vacuumin the chamber; at least one electrode positioned in the chamber, fordischarging at high voltage; an apparatus for fixing the electrode whichfixes the electrode; and a power supply for applying electric power tothe electrode, wherein the apparatus for fixing the electrode includes:an electrode holder part made of insulating material, for covering andfixing the end of the electrode; a lead line part passing through theelectrode holder part for electrically connecting the electrode and thepower supply; and a fixing part for fixing the electrode holder part ina proper position in the chamber.
 2. The apparatus of claim 1, furthercomprising: an internal holder made of conductive substance and coveringthe end of the electrode, wherein the electrode holder part fixes theinternal holder completely covering the holder.
 3. The apparatus ofclaim 2, wherein the lead line part connects the internal holder and apower supply.
 4. The apparatus of claim 1, wherein the apparatus forfixing the electrode further comprising: an elastic part for providingan elastic force in the longitudinal direction of the electrode.
 5. Theapparatus of claim 1, further comprising: an internal holder made ofcylindrical conductive substance to which the end of the electrode iswound, wherein the electrode holder part fixes the internal holdercompletely covering the holder.
 6. The apparatus of claim 5, wherein theelectrode holder part has a mounting groove in which the cylindricalinternal holder can be mounted.
 7. The apparatus of claim 6, wherein theinternal holder is connected to the power supply by a lead line partbeing lengthened to the outside of the electrode holder part.
 8. Theapparatus of claim 1, wherein the electrode holder part includes anupper holder, a lower holder and a combining part for combining the twoholders.
 9. An apparatus for fixing electrode in a plasma polymerizingapparatus, comprising: a processing chamber; a vacuum pump formaintaining vacuum condition in the chamber; at least one sheet-shapedelectrode positioned in the chamber, for discharging high voltage; apower supply for applying electric power to the electrode; an electrodeholder part made of insulating material, for covering and fixing the endof the electrode; a lead line part passing the electrode holder part forelectrically connecting the electrode and the power supply apparatus; afixing part for fixing the electrode holder part in a proper position inthe chamber; and an elastic part for providing an elastic-force in thelongitudinal direction of the electrode.
 10. The apparatus of claim 9,further comprising: an internal holder made of conductive substance andcovering the upper and lower surfaces of end of the electrode, whereinthe electrode holder part fixes the internal holder completely coveringthe holder.
 11. The apparatus of claim 10, wherein the internal holderincludes an upper plate, a lower plate and a combining part forcombining the two plates.
 12. The apparatus of claim 9, wherein theelectrode holder part includes an upper holder, a lower holder and acombining part for combining the two holders.
 13. The apparatus of claim9, wherein the elastic part includes: a supporting part for supportingthe electrode holder part at the lower portion of the electrode holderpart having a protrusion at the front; a sliding guide pin lengthened tothe protrusion penetrating the electrode holder part; and an elasticbody positioned between the protrusion and the holder.
 14. The apparatusof claim 13, wherein the electrode holder part can be moved in thelongitudinal direction of the electrode along the sliding guide pin. 15.An apparatus for fixing electrode in a plasma polymerizing apparatus,comprising: a processing chamber; a vacuum pump for maintaining vacuumcondition in the chamber; at least one sheet-shaped electrode positionedin the chamber, for discharging high voltage; a power supply forapplying electric power to the electrode; an electrode holder part madeof insulating material, for covering and fixing the end of theelectrode; a lead line part passing the electrode holder part forelectrically connecting the electrode and the power supply apparatus;and an internal holder made of cylindrical conductive substance, whichis fixed covered by the electrode holder part and to which an end of theelectrode is wound.
 16. The apparatus of claim 15, wherein the electrodeholder part includes an upper holder, a lower holder and a combiningpart for combining the two holders.
 17. The apparatus of claim 16,wherein the cylindrical internal holder is fixed being mounted in amounting groove formed on the upper surface of the lower holder and thelower surface of the upper holder.
 18. The apparatus of claim 16,wherein the lower holder has a main wall part to be protruded to therear upper surface and a protrusion part at both front ends of the mainwall part.
 19. The apparatus of claim 16, wherein the lower holderfurther includes: a fixing pin for fixing the upper holder and internalholder; and a secession preventing means for prevention secession of thefixing pin.
 20. The apparatus of claim 19, wherein the fixing pin has astopping groove at a predetermined depth on the circumferential surfaceof the front end.
 21. The apparatus of claim 19, wherein respective pinholes are formed at the both ends of the main wall part formed in thelower holder and both ends of the protrusion and upper holder to beconnected in case of being combined and the secession of the upperholder is prevented by inserting the fixing pin in the pin hole.
 22. Theapparatus of claim 19, wherein a vertical hole formed in the verticaldirection on the lower surface and connected with the pin hole is formedat the protrusion of the lower holder.
 23. The apparatus of claim 22,wherein a secession preventing means of a fixing pin, comprising astopper ball supported at one end of the spring and a screw capconnected at one the other end of the spring, is inserted in thevertical hole.